| Год | Нормы | Частота | Количество транзисторов | Площадь | Название |
| Сентябрь 1992 | 0.75 CMOS | 150 MHz @ 3.3V | 1.68 M | 233mm | DEC Alpha 21064 |
| Март 1993 | 0.8 BiCMOS | 60 and 66 MHz @ 5V | 3.1 M | 293mm | Intel Pentium (P5) |
| 1993 | 0.5 | 40 MHz | 1.5 M | hyperSPARC | |
| Октябрь 1993 | 0.5 CMOS | 225 - 275 MHz | 2.8 M | 152mm | DEC Alpha 21064A |
| 1994 | 0.4 | 90 MHz / 3.3v | 1.5 M | hyperSPARC 2 | |
| Январь 1995 | 0.5 | 266 MHz / 2.0v core + 3.3v IO | 9.3 M | 299mm | DEC Alpha 21164 |
| 1995 | 0.35 | 125 MHz / 3.3v | 1.5 M | hyperSPARC 3 | |
| Ноябрь 1995 | 0.50 / 0.35 BiCMOS | 150 MHz @ 3.1v / 166-200 MHz @ 3.3v | 5.5 M + cache (15.5M 256K / 31M 512K / later 2*31M for 1MB) | 306 / 196 mm + cache (202mm 256K@0.5 / 242 512K@0.35 / 2*242mm) | Intel Pentium Pro |
| 1996 | 0.29 | 135 MHz | 1.5 M | P2SC | |
| Октябрь 1998 | 0.25 + 0.35 | ?200 MHz | 15 M | 270 mm | POWER3 |
| Декабрь 1998 | 0.24 | 225 MHz / 2.5v + 3.3v | 17.6 M | 210 mm | SPARC64 III |
| 1999 | 0.22 | 450 MHz | 34 M | 140 mm | RS64-III |
| 2000 | 0.18 | ~15W @ 600 MHz | 44 M | 128 mm | RS64-IV |
| 2000 | 0.18 | 13W @ 500 MHz / 1.5 - 1.7v | 370 mm | UltraSPARC IIe | |
| 2000 | 0.13 | 450 MHz | SPARC64 IV | ||
| Ноябрь 2000 | 0.18 | 55W @ 1.5 GHz / 1.7v | 42 M | 217mm | Pentium 4 |
| 2001 | 0.18 | 115W @ 1.1 GHz / 1.5v | 174M | POWER4 | |
| 2002 | 0.13 | 1.9 GHz | 184M | 267 mm | POWER4+ |
| Январь 2002 | 0.13 | 55W @ 2.2 GHz / 1.5v | 55 M | Pentium 4 Northwood | |
| 2004 | 0.09 | 65W @ 1650 MHz / 1.0v | 400 M | 297mm | SPARC64 V+ |
| Февраль 2004 | 0.09 | 89W @ 3.4 GHz / 1.25v | 125 M | 112mm | Pentium 4 Prescott |
| Январь 2006 | 0.065 | 65W @ 3.6 GHz / 1.2v | Pentium 4 Cedar Mill | ||
| Июнь 2007 | 0.065 | 4.7 GHz | 790 M | 341mm | POWER6 |
| Ноябрь 2007 | 0.045 | 3 GHz | 2*410 M | 2*107mm | Core2 Extreme QX9650 (Yorkfield XE) |